A vacuum robot is a robot that works in a vacuum environment. It is mainly used in the semiconductor industry to transfer wafers in a vacuum chamber. Vacuum manipulators are difficult to import, are restricted, are used in large quantities, and have strong versatility. They have become a key component that restricts the research and development progress of complete semiconductor equipment and the competitiveness of complete machine products. Moreover, foreign countries have strictly scrutinized Chinese buyers and are included in the banned product catalog. Vacuum manipulators have become a "stuck neck" problem that seriously restricts the manufacturing of complete semiconductor equipment in my country. Direct-drive vacuum robot technology is an original and innovative technology. Key technologies include: (1) New configuration design technology for vacuum robots: through structural analysis and optimized design, avoiding international patents, new configurations are designed to meet the requirements for stiffness and expansion ratio of vacuum robots; (2) Large gap vacuum direct drive Motor technology: Involving large-gap vacuum direct-drive motors and high-clean direct-drive motors, motor theoretical analysis, structural design, manufacturing technology, motor material surface treatment, low-speed high-torque control, small multi-axis drives, etc. (3) Design of multi-axis precision shafting in vacuum environment. The design method of shafts in the shaft is adopted to reduce the problems of non-concentricity between shafts and asymmetry of inertia. (4) Dynamic trajectory correction technology: Through the fusion of sensor information and robot motion information, the offset between the reference position between the wafer and the finger is detected, and the motion trajectory is dynamically corrected to ensure that the robot accurately removes the wafer from the vacuum chamber. Transfer from one work station to another in the room.