the polysilicon production process includes four processes: trichlorosilane hydrogenation synthesis, trichlorosilane purification, polysilicon reduction, tail gas separation and recovery. At present, 8% of polysilicon production in the world adopts the improved Siemens process. After more than 5 years of development, this process has made great progress in energy saving, environmental protection and low-cost production. In view of the special demand of materials in the solar industry, a new polysilicon production process with lower production cost and suitable quality for solar products has been developed, such as silane process.
Three key equipments and technologies in China's polysilicon production technology are imported from Germany, the United States and Japan, and there are 17 core technologies (all with independent knowledge patents) in four processes on the production line. Especially for the core material recovery, the key process is the self-developed chlorohydrogenation technology (which has been patented in China), and has achieved remarkable results. At present, it has been achieved that a large amount of silicon tetrachloride, a by-product produced in the production of polysilicon, can all be converted into trichlorosilane, an intermediate raw material for the production of polysilicon.