Chinese name: transmission line pulse mbth: Tran * * * Issue Line Pulse abbreviation: TLP Speaker: maloney and other TLP equipment principles, the similarities and differences between TLP pulse and various electrostatic discharge models, the problems existing in the ESD IV curve testing technology of HBM model, the technology research and development process, technical services, and the principle of TLP equipment that the secondary breakdown current (It2) is the maximum ESD current that the equipment can withstand. When the ESD current exceeds this value, the device cannot restore its original characteristics. Because MIL-STD 883 Method30 15.7 defines the discharge resistance of HBM model as 1500 ohms, it can be seen that the maximum ESD withstand voltage of devices under HBM model is the IV curve of TLP test, VSD ≈ (1500+R devices) ×I t2. Similarly, for other electrostatic models (CDM, MM, etc. ), TLP is approximately equivalent to various electrostatic models under the same damage energy, and considering the trigger effect of rising edge, therefore, similar pulse width and rising edge are generally used for equivalence. Through further impact assessment, the appropriate electrostatic equivalent square waves of different models can be determined. The above curve can be measured by square wave and can be used for ESD protection design simulation under this electrostatic model. By using the on-off characteristics in the test waveform results, we can know the reverberation of the equipment under the corresponding model. For two/three-stage models such as IEC and spark discharge, it is necessary to test and analyze them in stages (such as ultrafast stage and normal stage). The similarities and differences between TLP pulse and various electrostatic discharge models TLP pulse is a myopia simulation method of various electrostatic discharge models and the core means of ESD protection technology research, but it has irreplaceable components with the traditional ESD pulse form. In irreplaceable aspects, the pulse square wave of TLP is different from the real situation. Although it can be simulated in myopia, there are always some differences. The result of fully adopting TLP may lead to some differences between the evaluation value and other manufacturers' equipment. What's more, due to the charge storage effect of the wafer, the test results of ESD test equipment from different manufacturers are different. In addition, TLP system is ultra-fast pulse, and slight parasitic effect will lead to waveform distortion. Multi-channel TLP system is difficult to realize, so the feasibility of replacing conventional ESD test equipment is weak. Similarly, TLP Equipment Department simulates various forms of ESD pulses, which can provide approximate simulation in both electrostatic damage and rising edge trigger, so it can also be considered that the two are consistent. Under this approximate cognition, TLP can provide three different key curves, IV, IT and VT, which other models cannot provide. Problems existing in testing technology of ESD IV curve of HBM model Recently, a testing method of solving ESD IV curve with HBM equipment was reported. This method provides a complete IV curve obtained under an ESD pulse by fitting. Because ESD pulse is instantaneous, the amplitude of ESD pulse changes in time and space, which is close to the speed of light. Due to the structural characteristics of HBM ESD pulse generator, there are some problems in current-voltage time synchronization. In addition, due to the structural characteristics of this equipment, it is difficult to suppress the overshoot caused by parasitic inductance, and even the influence of parasitic resistance needs to be obtained through data processing. In the above problems, although the time synchronization of current-voltage can be overcome by the time calibration of oscilloscope, it is still difficult to directly eliminate the overshoot caused by parasitic inductance and parasitic resistance. If these two effects are not eliminated, on the one hand, I-V information is mainly concentrated in the maximum value, and overshoot will cover it up. On the other hand, the resistance is usually less than 1 ohm, and the influence of acupuncture and parasitic test system is the same. The process of technology research and development internationally, Maloney and others proposed this ESD simulation method as early as 1985, and it has been widely used. Compared with the prototype, the product model appeared relatively late. Jon E. Barth of Barth Company and Evan Grund of Oryx Company have done excellent work in this field, providing the society with TLP equipment reaching the industrial level. Professor Ke from Taiwan Jiaotong University is one of the pioneers of TLP research in the Asia-Pacific region and has published his research results in an all-round way. Luo Hongwei of xidian university (currently in the Fifth Institute of Electronics of the Ministry of Information Industry) first introduced the concept of TLP testing technology, and Zeng Chuanbin of the Institute of Microelectronics of the Chinese Academy of Sciences developed the first TLP equipment in China, which can provide TLP simulation technology and meet the needs of society for various ESD models. Technical service situation Due to insufficient understanding of TLP equipment and high equipment price, the research on ESD protection technology in China has been lagging behind. According to the statistical results in 2009, less than 65,438+05% of the patents applied for ESD protection technology in Chinese mainland were applied by mainland companies, and a large part of these patents were applied by universities and research institutes. Accelerating the application of TLP in electrostatic discharge research is of great significance to the development of electrostatic discharge protection technology in China. At present, the units that can provide TLP in Chinese mainland mainly include: Zhejiang University, SMIC, the Fifth Institute of Electronics of the Ministry of Information Industry, and the Institute of Microelectronics of the Chinese Academy of Sciences. Among them, the TLP of Zhejiang University is the earliest imported TLP equipment in China, which has made an important contribution to the research of ESD protection technology in China. TLP equipment of Institute of Microelectronics, Chinese Academy of Sciences was a manual equipment before 20 12. After 20 12, the HOXI-I automatic TLP system was successfully developed, which can provide TLP pulses with pulse width of 1ns~200ns and rising edge of 0. 1ns~ 10ns and 0-20A (up to 40A), and can basically simulate all existing electrostatic pulse forms. In terms of equipment sales, Barth, Oryx, Thermo Scientific and Binnovation company, etc.