What are some interesting nano-electromechanical systems?

In the past 20 years, people have been actively studying MEMS. With the improvement of manufacturing process precision, the size of devices is rapidly shrinking, and nano-scale MEMS appears, which is nano-electromechanical system (NEMS). NEMS is a new concept based on MEMS technology, which refers to a kind of subminiature mechatronics research field with nano-technical characteristics in feature size and effect, including quantum effect, interface effect produced by nano-scale structure and devices and systems characterized by nano-scale effect, such as nano-scale mechanical equipment, electronic devices, computers and sensors. As soon as NEMS technology appeared, prototypes of nano-mechanical oscillators and sensors, nano-electromechanical resonators and other devices were developed. NEMS technology will have great vitality in various fields.