Photoluminescence spectrum scanning imager for LED epitaxial wafer

The PL spectrum scanning imager of LED epitaxial wafer of Beijing Zhongtuo Machinery Co., Ltd. is a patented product developed by the Department of Physics of Tsinghua University with the support of the National 863 Program after seven years of research and improvement. The imager is used for fast on-line inspection of LED epitaxial wafer quality, mainly used in LED epitaxial wafer and chip production line to generate high-resolution maps and measure film thickness. The instrument provides fast and reliable data feedback for the optimal control of epitaxial wafer production process, and provides reliable guarantee for improving production quality. The imager has been successfully applied to several LED epitaxial wafer production lines.

Main functions:

1, scanning and detecting point by point;

2. Computer analysis and calculation of epitaxial wafer integration, light intensity and main wavelength. Peak wavelength, spectral half width and other parameters;

3. Display the distribution and data in the form of drawing, cross-sectional distribution map and single-point spectrum;

4. Display the statistical results of each parameter;

5. Display the statistical parameters of the selected range;

6. Local scanning can be carried out, and isolated points and edges can be removed from the scanning results;

7. Measure the film thickness by white light reflection spectrum, and display the distribution and data in the form of drawing;

8, equipped with offline data processing software.

The instrument runs reliably and has a compact structure. All detection and data processing are completed automatically by the computer. User-friendly window interface is adopted, which is easy to operate. Users can use it with little training, and they can choose different lasers according to different epitaxial wafers.