The difference between a photolithography machine and an etching machine:
Etching is easier than photolithography. The photolithography machine prints the pattern, and then the etching machine etches away the patterned (or non-patterned) parts according to the printed pattern, leaving the remaining parts. Photolithography refers to covering a wafer (or silicon wafer) covered with photoresist with a pre-made photoresist, and then using ultraviolet rays to illuminate the wafer for a certain period of time through the photoresist. The principle is to use ultraviolet rays to deteriorate part of the photoresist and make it easy to corrode. Etching means that after photolithography, the deteriorated part of the photoresist is etched away with an etching solution (positive resist), and the pattern of the semiconductor device and its connections is displayed on the surface of the wafer. Then another etching liquid is used to etch the wafer to form semiconductor devices and their circuits.
In 1944, Yin Zhiyao was born in a patriotic family in Beijing. His grandfather was a government-funded student studying abroad, and his father also studied in Japan and then returned to the motherland to contribute to the country.
In 1962, Yin Zhiyao was successfully admitted to the Department of Chemical Physics of the University of Science and Technology of China. After graduating in 1968, he was assigned to work in the Lanzhou Refinery and the Lanzhou Institute of Physical Chemistry, Chinese Academy of Sciences. In 1978, Yin Zhiyao continued his efforts and entered He studied for a master's degree in the Chemistry Department of Peking University. In 1980, he went to the University of California, Los Angeles, to continue his studies and obtain a doctorate in physical chemistry.
After that, Yin Zhiyao worked in Silicon Valley for 20 years. During this period, he first entered Intel Corporation. In 1986, Yin Zhiyao was invited to join L5M, mainly responsible for the research and development of plasma etching equipment. In 1991, Applied Materials Company invited him Serves as the engineering and technical director of the plasma etching headquarters. In order to avoid intellectual property issues, he led the team to start from scratch. In just nine years, Applied Materials occupied 40% of the international etching machine equipment market
Yin Zhiyao has 86 projects in the semiconductor industry U.S. patents, and more than 200 patents from various countries, and is recognized as one of the most accomplished Chinese in Silicon Valley.
However, just when he retired at the age of 60, Yin Zhiyao made a bold decision. He returned to China with his team of 15 people. In 2004, he founded Zhongwei Semiconductor Company to bring China Breaking through the technical monopoly of etching machines laid the foundation for my country's independent chip production technology. Today, the etching machines produced by China Micro Semiconductor Company can engrave 100 million to 1 billion words on rice grains, and Yin Zhiyao's contribution to the motherland Still going on.