1, South China University of Technology Microelectronics Equipment Co., Ltd. has occupied 80% of the domestic market share. By June 6, 2023, the company has applied for more than 2,400 patents in the related fields of microelectronics manufacturing, which can be regarded as a domestic mask aligner giant, equivalent to more patents of Zhongke Shuguang than South China University of Technology.
2. As early as 1980s, Zhongke Shuguang began to develop and produce mask aligner, which occupied an important position in the domestic high-end chip manufacturing field. The quality and stability of its mask aligner are highly appraised. Although South China University of Technology has also dabbled in the field of mask aligner, there is still a clear gap compared with Zhongke Shuguang. Mask aligner is a very important equipment in the semiconductor manufacturing process, which can transfer the chip graphics to the silicon wafer, which is one of the keys to manufacturing high-quality chips.