[Invention] Optical grinder and method for processing sapphire crystal substrate for semiconductor by using the grinder.
Patent No.200310121135.5
No right in the current legal state-transfer of the right not to pay the annual fee
Abstract: The invention belongs to the technical field of surface processing of optical elements, and relates to an optical grinder and a method for processing sapphire crystal substrates for semiconductors by using the grinder. The grinder comprises a frame, a workbench panel, a water pool, a motor and a vertical rotating shaft driven by the motor, wherein the top of the rotating shaft is provided with a lower grinding disc, an upper grinding disc supporting and pressing mechanism, an upper grinding disc arranged on the lower grinding disc and a cooling liquid conveying device; The lower grinding disc consists of a chassis, an internal gear ring, an external gear sun gear and a plurality of planetary discs installed on the chassis. The processing method includes using silicon carbide grinding disc, coarse grinding and fine grinding with boron carbide as abrasive, polishing with polyurethane film as polishing skin and polishing with silica gel slurry. The invention has the characteristics of high processing efficiency, low processing cost and high processing precision, can meet the processing requirements of optical sapphire crystal substrates for semiconductors, and is beneficial to industrialization.
[Utility model] Optical grinder -200320 127697.6
No entitlement-no annual fee paid
Applicant: Wang Kaiqing
Date of application: 2003- 12- 16
The invention belongs to the technical field of surface processing of optical elements, and relates to an optical grinder and a method for processing sapphire crystal substrates for semiconductors by using the grinder. The grinder comprises a frame, a workbench panel, a water pool, a motor and a vertical rotating shaft driven by the motor, wherein the top of the rotating shaft is provided with a lower grinding disc, an upper grinding disc supporting and pressing mechanism, an upper grinding disc arranged on the lower grinding disc and a cooling liquid conveying device; The lower grinding disc consists of a chassis, an internal gear ring, an external gear sun gear and a plurality of planetary discs installed on the chassis. The utility model has the characteristics of high processing efficiency, low processing cost and high processing precision, which can meet the processing requirements of optical sapphire crystal substrates for semiconductors and is beneficial to industrialization.
Grinding process of optical sapphire crystal substrate
No entitlement-no annual fee paid
Application number: 03 14 1638.438+0.
Date of application: July 2003-65438+June.
Abstract: The invention discloses a grinding process of an optical sapphire crystal substrate, which mainly comprises the process steps of rough grinding, fine grinding and polishing. The first pass rate of the sapphire crystal substrate obtained by the grinding process is more than 98.5%, the surface roughness is less than 0.3 nm, the flatness is less than 5 microns, the flatness parallelism is+/-±±0.025mm, and the thickness dimension tolerance is less than+/-0.025mm.. ..
Applicant: Shanghai New Huaxia Industry Co., Ltd.
Inventor: Wang Kaiqing
[The utility model] Double-sided grinding precision grinding equipment
Patent No.03255659.4
No entitlement-no annual fee paid
Applicant: Shanghai New Huaxia Industry Co., Ltd.
Date of application: July 2003-65438+June.
The utility model relates to a precision grinding device for double-sided grinding, which comprises a lathe bed, an operation control station, a pneumatic device, a grinding liquid pump, an electrical control system and a spindle installed at the end face of the lathe bed, and the lower end of the spindle is connected with a spindle gear box installed in the lathe bed. The upper end of the spindle is equipped with a gear, and the outer ring of the spindle is equipped with a lower grinding disc and an inner gear ring in two layers. Planetary gears can be installed on the lower grinding disc, and the planetary gears are meshed with the upper gear and the internal gear ring of the main shaft, and both revolve and rotate; The upper grinding disc is pivoted with one side end of the cantilever mounted on the lathe bed through a sliding bar, and is controlled by a pneumatic device to move up and down. The utility model has the advantages of simple structure, low price, convenient maintenance and low processing cost, and can be used for grinding the optical sapphire crystal substrate.