It is an interdisciplinary frontier research field developed on the basis of microelectronics technology. After more than 40 years of development, it has become one of the major scientific and technological fields attracting worldwide attention. It involves electronics, machinery, materials, physics, chemistry, biology, medicine and other disciplines and technologies, and has broad application prospects.
By the end of 20 10, about 600 companies around the world were engaged in the research and production of MEMS, and developed hundreds of products including micro-pressure sensors, acceleration sensors, micro-inkjet print heads, digital micromirror displays, etc., among which MEMS sensors accounted for a considerable proportion. MEMS sensor is a new type of sensor manufactured by microelectronics and micromachining technology.
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Application—
MEMS sensor is applied to non-invasive fetal heart rate detection, which is a highly technical work. Because of the fast fetal heart rate, it is difficult to accurately measure it by hand with traditional stethoscope or even ultrasonic Doppler instrument with amplification function, which is between L20 ~ 160 times per minute.
Ultrasonic Doppler fetal heart monitor with digital display function is expensive, only used in a few large hospitals, and cannot be popularized in small and medium-sized hospitals and vast rural areas. In addition, the ultrasonic vibration wave acts on the fetus, which will have great adverse effects on the fetus. Although the detection dose is very low, it belongs to the category of destructive detection and is not suitable for regular and repetitive inspection and home use.
Baidu encyclopedia -MEMS sensor