Ceramic handling arm, also known as end effector, ceramic manipulator, etc., forms the top of the mechanical arm and is used to handle and move semiconductor wafers between positions.
We live in an era of increasingly advanced science and technology. The semiconductor industry occupies a wider and wider position in the 36 lines, and the industrial chain has been very perfect. Today, Xiaobian from Junjie Ceramics is going to talk about the ceramic handling arm used in the semiconductor industry. As we all know, the wafer silicon wafer is a very tiny object and must be very careful in the transfer process. For fast and safe handling, people have designed a ceramic handling arm, which plays a role in manipulating and handling silicon wafers in the whole production process of semiconductor technology. It can not only carry parts in the vacuum channel, but also handle large-size wafers.
ceramic handling arm, also known as end effector, ceramic manipulator, etc., forms the top of the mechanical arm and is used to handle and move semiconductor wafers between positions. It is equivalent to the hand of a robot, so it is important that its thermal stability and size need to be very stable, and it will not pollute the particle and chemical pollutant chamber.
after years of experience, researchers have found a more suitable material for manufacturing semiconductor ceramic arms, that is, fine ceramic materials. Compared with other materials, the semiconductor ceramic arm made of fine ceramic materials has great advantages, because the high temperature resistance and wear resistance of fine ceramic materials are many times higher than those of other materials, and its hardness is incomparable with other materials. Using fine ceramic materials can enhance the function, reduce the damage to the wafer/glass panel and prevent the spread of pollution.
among the ceramic handling arms made of fine ceramic materials, the performance-price ratio of the ceramic handling arms made of alumina materials is incomparable with other fine ceramic materials. High-purity alumina ceramics have high air tightness, strong wear resistance and anti-static. The flatness of the alumina ceramic handling arm processed by Junjie Ceramics can even reach .1.
the semiconductor wafer handling arm is usually used in the high temperature environment of 22℃, and the thermal expansion coefficient from 2℃ -1℃ to 28℃ can reach 13* 1∧6, which many materials can't meet. However, fine ceramic materials can be used, and the ceramic handling arm made of alumina material has excellent high temperature resistance.
In addition, the semiconductor wafer handling arm also needs high hardness and high wear resistance. The hardness of the handling arm made of fine ceramics is not only second only to that of diamond, but also its wear resistance far exceeds that of steel and chrome steel. Ceramic handling arm has better wear resistance and hardness than other materials. The wear resistance and hardness of alumina ceramics can fully meet the requirements of ceramic handling arm, and it is more affordable than other fine ceramic materials.