1. Development direction and discipline frontier
(1) Cooperate with the technological innovation of numerical control equipment (such as spindle speed and precision creation)
The main error sources of numerical control equipment can be divided into geometric error (there are 21 items in * * *) and thermal error. For repeated systematic errors, software can be used to correct them; For the case of large random error, real-time correction method should be adopted. Generally, the thermal error should be corrected by temperature measurement. One of the reasons why the market of China machine tool industry has shrunk and imported a large number of foreign equipment is that this technology has not been popularized and applied. Therefore, a high-speed multi-channel laser interferometer is needed: its measuring speed is over 6m/min and sampling speed is over 5 times /sec, so as to meet the needs of thermal error and geometric error measurement. The real-time measurement of air refractive index should reach the level of -7 power of 2×1, and its measurement results and length measurement results can be input into the computer synchronously.
(2) Monitoring and On-line Detection Technology of Operation and Manufacturing Process
Sensors that comprehensively apply the principles of image, spectrum, spectrum, optical fiber and other light-substance interaction have the advantages of non-contact, high sensitivity, high flexibility and wide application range. The world of comprehensive innovation in this field is very broad, such as vibration, roughness, pollutants, water content, processing size and mutual position.
(3) Cooperate with technological innovation of information industry and production science
In order to survive in an open environment, there is no way out without independent innovation technology. Therefore, we should choose some projects to support according to the principles of patent right, technical content and market. According to the current development status, products needed in information, life medicine, environmental protection, agriculture and other fields should be given priority support. Such as precision instruments and equipment for interventional therapy in medicine, super-resolution lithography and cleaning methods and mechanisms in electronic industry.
2. Priority areas
At the initial stage of basic research, it is difficult to predict whether there will be a breakthrough. However, when a breakthrough has been made, a transformation mechanism is needed to enter the market.
(1) Nanometer traceability technology and system.
(2) Coordinate tracking measurement system involved in installation and manufacture.
key theories and technologies: super-hemispherical reflector (n=2 or innovation in mechanism), fast and multi-channel interferometer (frequency difference of 3 ~ 5 trillion), two-dimensional precise tracking angle measuring system (.2 ″ ~ .5 ″), general signal processing system (working frequency of 5 trillion), trackless semiconductor laser measuring system (resolution of 1μm), thermal deformation simulation and force deformation simulation.
these contents are not limited to one technical scheme, but * * * similarities summarized from several different technical schemes. If the trackless interferometer is used, the requirements for tracking system can be reduced; High precision can be obtained by using two-dimensional precision tracking angle measuring system within the measuring range of 1M3. The accuracy of the 4-way tracking scheme can be improved with the super-hemispherical mirror. It can't wait for a long time to get involved in manufacturing and assembly in the field. The compensation of force and thermal deformation is necessary and fast enough. There is still a considerable gap between the current technologies, so these advances are crucial.
Application scope: identification of new parallel mechanism machine tools, identification of aircraft assembly jig, installation of large equipment, and calibration of biochip precision robots.
(3) Non-contact probe and various scanning probe microscopes.
the aerospace industry has put forward urgent requirements for this, which is the key technology for the development of CMM in the future. At present, the contact probe has been completely monopolized by foreign countries, and the non-contact probe has not yet matured, so we have the opportunity to participate in the competition. The principle of laser triangulation, which was widely used in the past, is limited, so it is difficult to make a breakthrough, but we can work hard on the principle innovation. The resolution of .1 ~ .5 μ m should be exceeded.
(4) Computer-aided measurement theory.
standardization, modularization, compatibility and integration of signal processing system. For example, at present, most computers use ISA bus and IEEE488 port. In the future, computers may cancel ISA bus, and USB interface for notebook computers will be widely used. In the past, the instruments produced in China were satisfied with digital display, and it was difficult to enter the international market without data exchange interface. Instruments produced abroad are generally equipped with IEEE488(GPIB) ports. RS232: USB, IEEE1394 and VXI are the high-performance standards that may become substitutes at present. This turning point provides us with opportunities. At present, the working frequency band of virtual instrument is in the order of kilohertz, which is too low for interference signal processing. We can adopt the method of joint complementarity to form a module series, reduce the cost and improve the efficiency of research and development as a whole. According to the existing foundation, developing special skills is conducive to overcoming repeated research.
(5) new devices and new materials.
In the past, the scientific research evaluation system tended to focus on the whole machine and system, ignoring materials and devices. New breakthrough points may appear in new light sources and new high-frequency detectors. At present, the response frequency of the detector is only 1 to the ninth power, while the optical frequency is as high as 1 to the fourteenth power. At present, the interferometer actually acts as a mixer to adapt to the deficiency of the detector (if the response of the detector really exceeds the optical frequency, the interferometer will be useless). If the performance of the detector is significantly improved, it will also be a great breakthrough for communication.
(6) Research and innovation of the metrological characteristics of semiconductor lasers.
many problems (such as line width, calibration, frequency conversion, etc.) need to be solved when semiconductor lasers are used in metrology. However, if many problems are solved, the semiconductor laser system will be more complicated than the gas laser system and will not be competitive. Some problems are not completely solved at the physical level. For example, if a semiconductor laser can form a dual frequency, it is undoubtedly a very important characteristic. If it can scan both frequencies and two similar frequencies, it will become a new trackless measurement tool.