Generally, the performance of diffusion pump depends on the limit vacuum, maximum back pressure, pumping rate and the setting of cold trap or cryogenic baffle. ?
Introduction of diffusion pump
From 19 13 years, it has been10/year since Gede invented the diffusion pump, during which the technology has made great progress. The pumping speed of oil diffusion pump is above 100000 L/s, and the pumping speed of diffusion jet pump is above 40000 l/s. Steam flow vacuum pump plays a very important role in vacuum application field.
Although many other types of pumping methods can also work in the field of high vacuum, diffusion pump has always been the main pumping equipment to obtain high vacuum because of its simple structure, convenient operation and maintenance, long service life and good pumping characteristics for various gases.
Gade applied for a patent in Germany on September 25th, 2003 with the patent number of 1965438+, which is a device for generating high vacuum by using mercury vapor flow. He pointed out that high vacuum is obtained by diffusion, so this kind of pump is known as diffusion pump. According to the literature report of the former Soviet Union, this kind of pump was first proposed by Russian scholar Barlowick in 19 12 at the Institute of Physics in Petersburg.