Tianjin Huahai Zero2IPO Electromechanical Technology Co., Ltd. (hereinafter referred to as "Huahai Zero2IPO") is a limited liability company jointly funded by Tianjin Municipal Government and Tsinghua University to promote the industrialization of CMP technology and equipment in China. The company is located in Haihe Science and Technology Park, Jinnan District, Tianjin. From preparation to establishment, the company has been fully supported by Tianjin governments at all levels and Tsinghua University.
Tsinghua University R&D team has mastered the key technologies of ultra-low voltage CMP equipment and technology through the implementation of the national science and technology major project "Very Large Scale Integrated Circuit Equipment and Complete Process" (referred to as "Project 02"), and successfully developed the first "dry-in and dry-out" CMP equipment for copper process polishing in China, with initial industrialization capability. ?
Huahai Zero2IPO has a registered capital of 60 million yuan. The company has the core technology and backbone team of CMP equipment in Tsinghua University. Through resource integration and talent introduction, it has become a high-tech company with independent core technology and strong scientific research team.
Products and services:
Universal-300 Plus is a new type 12 inch CMP equipment developed according to market demand. It has four polishing units and a single cleaning unit, and integrates various endpoint detection technologies, which can meet various process requirements such as 45 ~ 130 nm oxide /STI/Poly/Cu/W CMP.
Universal-300 T is equipped with more advanced combined cleaning technology on the basis of 300 X model, which shows better cleaning effect, and can meet various process requirements such as oxide/SiN/STI/Poly/Cu/W CMP in logic factory below 28nm and 1xnm storage factory.